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Characteristics of He ion implanted layers on single-crystal diamond

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hal-03578185 , version 1 (17-02-2022)

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  • HAL Id : hal-03578185 , version 1

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Audrey Valentin, Mary de Feudis, Ovidiu Brinza, André Tardieu, Riadh Issaoui, et al.. Characteristics of He ion implanted layers on single-crystal diamond. Surface and Bulk Defects in Diamond ( SBDD ) XXIII, Mar 2018, Hasselt, Belgium. ⟨hal-03578185⟩
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