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Characteristics of He ion implanted layers on single-crystal diamond

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Physics [physics] Condensed Matter [cond-mat] Materials Science [cond-mat.mtrl-sci] Engineering Sciences [physics] Chemical and Process Engineering Engineering Sciences [physics] Materials Engineering Sciences [physics] Micro and nanotechnologies/Microelectronics Engineering Sciences [physics] Electronics
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Submitted on : Thursday, February 17, 2022-10:02:14 AM

Last modification on : Tuesday, February 7, 2023-2:45:18 PM

Long-term archiving on: Wednesday, May 18, 2022-6:29:20 PM

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hal-03578185 , version 1 (17-02-2022)

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  • HAL Id : hal-03578185 , version 1

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Audrey Valentin, Mary de Feudis, Ovidiu Brinza, André Tardieu, Riadh Issaoui, et al.. Characteristics of He ion implanted layers on single-crystal diamond. Surface and Bulk Defects in Diamond ( SBDD ) XXIII, Mar 2018, Hasselt, Belgium. ⟨hal-03578185⟩

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UNIV-PARIS13 CNRS LSPM_P13 USPC GALILE SORBONNE-PARIS-NORD
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