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Nondestructive Multilayer Coating Thickness Measurement Based on Autoregressive Extrapolation

Min Zhai 1 A. Locquet 1 David Citrin 1
1 Georgia Tech Lorraine [Metz]
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Conference papers
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https://hal-cnrs.archives-ouvertes.fr/hal-03477614
Contributor : Nadege Dastillung Connect in order to contact the contributor
Submitted on : Monday, December 13, 2021 - 2:59:34 PM
Last modification on : Tuesday, January 4, 2022 - 6:51:11 AM

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  • HAL Id : hal-03477614, version 1

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CNRS | UNIV-FCOMTE | UMI-GTL | CENTRALESUPELEC

Citation

Min Zhai, A. Locquet, David Citrin. Nondestructive Multilayer Coating Thickness Measurement Based on Autoregressive Extrapolation. 9th International Workshop on Terahertz Technology and Applications, Mar 2020, Kaiserslautern, Germany. ⟨hal-03477614⟩

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