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Scalable high-precision tuning of miniature photonic resonators by resonant cavity-enhanced photoelectrochemical etching

Eduardo Gil-Santos 1 Christopher Baker 1 Aristide Lemaître 2 Sara Ducci 1 Carmen Gomez 2 Giuseppe Leo 1 Ivan Favero 1 
1 MPQ (UMR_7162) - Laboratoire Matériaux et Phénomènes Quantiques
2 C2N - Centre de Nanosciences et de Nanotechnologies
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https://hal-cnrs.archives-ouvertes.fr/hal-03449022
Contributor : Ivan Favero Connect in order to contact the contributor
Submitted on : Thursday, November 25, 2021 - 2:49:39 PM
Last modification on : Thursday, April 7, 2022 - 1:58:33 PM
Long-term archiving on: : Saturday, February 26, 2022 - 8:52:23 PM

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  • HAL Id : hal-03449022, version 1

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CNRS | UNIV-PARIS-SACLAY | UNIV-PARIS | UP-SCIENCES | MPQ | GS-ENGINEERING | GS-PHYSIQUE | INSTITUT-SCIENCES-LUMIERE

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Eduardo Gil-Santos, Christopher Baker, Aristide Lemaître, Sara Ducci, Carmen Gomez, et al.. Scalable high-precision tuning of miniature photonic resonators by resonant cavity-enhanced photoelectrochemical etching. Nature Communications, Nature Publishing Group, 2017. ⟨hal-03449022⟩

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