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Scalable high-precision tuning of miniature photonic resonators by resonant cavity-enhanced photoelectrochemical etching

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https://hal-cnrs.archives-ouvertes.fr/hal-03449022
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Submitted on : Thursday, November 25, 2021 - 2:49:39 PM
Last modification on : Friday, January 7, 2022 - 3:53:21 AM

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  • HAL Id : hal-03449022, version 1

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Eduardo Gil-Santos, Christopher Baker, Aristide Lemaître, Sara Ducci, Carmen Gomez, et al.. Scalable high-precision tuning of miniature photonic resonators by resonant cavity-enhanced photoelectrochemical etching. Nature Communications, Nature Publishing Group, 2017. ⟨hal-03449022⟩

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