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Multi-microscopy nanoscale characterization of the doping profile in a hybrid Mg/Ge-doped tunnel junction

E Di Russo 1 A Mavel V Fan Arcara B Damilano Ioanna Dimkou S Vézian A Grenier M Veillerot N Rochat G Feuillet B Bonef L Rigutti J-y Duboz 2 E Monroy D Cooper 
1 CEA-LETI - Commissariat à l'énergie atomique et aux énergies alternatives - Laboratoire d'Electronique et de Technologie de l'Information
2 CRHEA - Centre de recherche sur l'hétéroepitaxie et ses applications
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https://hal-cnrs.archives-ouvertes.fr/hal-03411327
Contributor : jean-yves duboz Connect in order to contact the contributor
Submitted on : Tuesday, November 2, 2021 - 10:50:55 AM
Last modification on : Thursday, August 4, 2022 - 5:05:52 PM

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E Di Russo, A Mavel, V Fan Arcara, B Damilano, Ioanna Dimkou, et al.. Multi-microscopy nanoscale characterization of the doping profile in a hybrid Mg/Ge-doped tunnel junction. Nanotechnology, Institute of Physics, 2020, 31 (46), pp.465706. ⟨10.1088/1361-6528/ab996c⟩. ⟨hal-03411327⟩

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