Skip to Main content Skip to Navigation
Journal articles
Manon Goubet 1 Constantin Matei 1 Zineb Saghi 1 Bernard Viala 1 Jean-Herve Tortai 2
1 CEA-LETI - Commissariat à l'énergie atomique et aux énergies alternatives - Laboratoire d'Electronique et de Technologie de l'Information
2 LTM - Laboratoire des technologies de la microélectronique
Document type :
Journal articles
Complete list of metadata
https://hal-cnrs.archives-ouvertes.fr/hal-03368045
Contributor : Jean-Hervé Tortai Connect in order to contact the contributor
Submitted on : Monday, October 11, 2021 - 4:22:54 PM
Last modification on : Tuesday, October 19, 2021 - 11:06:20 AM

Files

Vignette du document
Fourth draft -Hall.pdf
Files produced by the author(s)

Identifiers

Collections

CNRS | CEA | DRT | LETI | LTM | CEA-GRE | MINASEE | PROSPECT | UGA

Citation

Manon Goubet, Constantin Matei, Zineb Saghi, Bernard Viala, Jean-Herve Tortai. No title. Microscopy and Microanalysis, Cambridge University Press (CUP), 2021, 27, pp.1766 - 1768. ⟨10.1017/s1431927621006462⟩. ⟨hal-03368045⟩

Export

BibTeX TEI DC DCterms EndNote

Share

Metrics

Record views

9

Files downloads

4