Enhanced dielectric properties of epoxy-based photoresist nanocomposites using carbon-coated nickel nanoparticles for high voltage integrated capacitors

M.S. S Alfonso (1, 2) , C. Lapeyronie (1, 2) , M. Goubet (2, 1) , B. Viala (2) , J. H. Tortai (1, 2)

1 LTM - Laboratoire des technologies de la microélectronique
2 CEA-LETI - Commissariat à l'énergie atomique et aux énergies alternatives - Laboratoire d'Electronique et de Technologie de l'Information

High-k nanocomposite photoresists are highly sought-after dielectric materials for the manufacturing and miniaturization of integrated capacitors. Herein, in-depth high voltage dielectric characterizations of Metal Polymer Composites (MPCs) having carbon-coated nickel nanoparticles (Ni@C) dispersed into epoxy-based photoresist (SU-8) are reported. ±0.38 MV/cm occurred. This study shows a reliable wafer-scale film fabrication process of MPCs for the manufacturing of long-awaited miniaturization of high-voltage capacitors.

Mots clés: Nano Composite; Nano particles; Core-shell nanostructures; Dielectric properties; Polymer-matrix composites

Domaines: Matériaux; Micro et nanotechnologies/Microélectronique

M.S. S Alfonso, C. Lapeyronie, M. Goubet, B. Viala, J. H. Tortai. Enhanced dielectric properties of epoxy-based photoresist nanocomposites using carbon-coated nickel nanoparticles for high voltage integrated capacitors. Composites Science and Technology, 2021, 216, pp.109063. ⟨10.1016/j.compscitech.2021.109063⟩. ⟨hal-03367966⟩