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Journal Articles Composites Science and Technology Year : 2021

Enhanced dielectric properties of epoxy-based photoresist nanocomposites using carbon-coated nickel nanoparticles for high voltage integrated capacitors

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Abstract

High-k nanocomposite photoresists are highly sought-after dielectric materials for the manufacturing and miniaturization of integrated capacitors. Herein, in-depth high voltage dielectric characterizations of Metal Polymer Composites (MPCs) having carbon-coated nickel nanoparticles (Ni@C) dispersed into epoxy-based photoresist (SU-8) are reported. ±0.38 MV/cm occurred. This study shows a reliable wafer-scale film fabrication process of MPCs for the manufacturing of long-awaited miniaturization of high-voltage capacitors.
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Dates and versions

hal-03367966 , version 1 (06-10-2021)

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Cite

M.S. S Alfonso, C. Lapeyronie, M. Goubet, B. Viala, J. H. Tortai. Enhanced dielectric properties of epoxy-based photoresist nanocomposites using carbon-coated nickel nanoparticles for high voltage integrated capacitors. Composites Science and Technology, 2021, 216, pp.109063. ⟨10.1016/j.compscitech.2021.109063⟩. ⟨hal-03367966⟩
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