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Enhanced dielectric properties of epoxy-based photoresist nanocomposites using carbon-coated nickel nanoparticles for high voltage integrated capacitors

Abstract : High-k nanocomposite photoresists are highly sought-after dielectric materials for the manufacturing and miniaturization of integrated capacitors. Herein, in-depth high voltage dielectric characterizations of Metal Polymer Composites (MPCs) having carbon-coated nickel nanoparticles (Ni@C) dispersed into epoxy-based photoresist (SU-8) are reported. ±0.38 MV/cm occurred. This study shows a reliable wafer-scale film fabrication process of MPCs for the manufacturing of long-awaited miniaturization of high-voltage capacitors.
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https://hal-cnrs.archives-ouvertes.fr/hal-03367966
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Submitted on : Wednesday, October 6, 2021 - 3:05:31 PM
Last modification on : Thursday, July 7, 2022 - 10:01:00 AM
Long-term archiving on: : Friday, January 7, 2022 - 7:08:32 PM

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M.S. S Alfonso, C. Lapeyronie, M. Goubet, B. Viala, J. H. Tortai. Enhanced dielectric properties of epoxy-based photoresist nanocomposites using carbon-coated nickel nanoparticles for high voltage integrated capacitors. Composites Science and Technology, Elsevier, 2021, 216, pp.109063. ⟨10.1016/j.compscitech.2021.109063⟩. ⟨hal-03367966⟩

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