Thomas Alcaire, Delphine Le Cunff, Victor Gredy, Jean-Herve Tortai. Spectroscopic Ellipsometry Imaging for Process Deviation Detection via Machine Learning Approach.
2020 31st Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC), Aug 2020, Saratoga Springs, United States. pp.1-6,
⟨10.1109/ASMC49169.2020.9185349⟩.
⟨hal-03017738⟩