 |
HAL-CNRSCNRS scientific publications |
 |
Journal articles
Hybridization of ellipsometry and energy loss spectra from XPS for bandgap and optical constants determination in SiON thin films
Abstract : Comparison of bandgap determination using ellipsometry and ELS-XPS. • Large energy bandgap difference between the two methods, up to 1.6 eV. • Combination of the two techniques, using a triple Tauc-Lorentz oscillator model. • Robust determination of the bandgap in the SiO 2-Si 3 N 4 system. • Method to measure n and k in a large energy range, from 1.5 up to 30 eV.
https://hal-cnrs.archives-ouvertes.fr/hal-03017737
Contributor : Jean-Hervé Tortai Connect in order to contact the contributor
Submitted on : Tuesday, December 1, 2020 - 3:12:36 PM
Last modification on : Tuesday, October 19, 2021 - 11:06:20 AM
Long-term archiving on: : Tuesday, March 2, 2021 - 6:13:28 PM
Contributor : Jean-Hervé Tortai Connect in order to contact the contributor
Submitted on : Tuesday, December 1, 2020 - 3:12:36 PM
Last modification on : Tuesday, October 19, 2021 - 11:06:20 AM
Long-term archiving on: : Tuesday, March 2, 2021 - 6:13:28 PM