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Hybridization of ellipsometry and energy loss spectra from XPS for bandgap and optical constants determination in SiON thin films

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https://hal-cnrs.archives-ouvertes.fr/hal-03017737
Contributor : Jean-Hervé Tortai <>
Submitted on : Saturday, November 21, 2020 - 1:11:40 PM
Last modification on : Wednesday, December 2, 2020 - 3:28:33 AM

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Joao Resende, David Fuard, Delphine Le Cunff, Jean-Herve Tortai, Bernard Pelissier. Hybridization of ellipsometry and energy loss spectra from XPS for bandgap and optical constants determination in SiON thin films. Materials Chemistry and Physics, Elsevier, 2020, 259, pp.124000. ⟨10.1016/j.matchemphys.2020.124000⟩. ⟨hal-03017737⟩

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