Hybridization of ellipsometry and energy loss spectra from XPS for bandgap and optical constants determination in SiON thin films

Joao Resende; David Fuard; Delphine Le Cunff; Jean-Herve Tortai; Bernard Pelissier

doi:10.1016/j.matchemphys.2020.124000

Journal articles

Hybridization of ellipsometry and energy loss spectra from XPS for bandgap and optical constants determination in SiON thin films

Joao Resende ¹ David Fuard ¹ Delphine Le Cunff ² Jean-Herve Tortai ¹ Bernard Pelissier ¹

1 LTM - Laboratoire des technologies de la microélectronique

2 ST-CROLLES - STMicroelectronics [Crolles]

Document type :

Journal articles

Domain :

Engineering Sciences [physics]

Complete list of metadatas

https://hal-cnrs.archives-ouvertes.fr/hal-03017737
Contributor : Jean-Hervé Tortai <>
Submitted on : Saturday, November 21, 2020 - 1:11:40 PM
Last modification on : Wednesday, December 2, 2020 - 3:28:33 AM

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Hybridization of ellipsometry and energy loss spectra from XPS for bandgap and optical constants determination in SiON thin films

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HAL-CNRS

Hybridization of ellipsometry and energy loss spectra from XPS for bandgap and optical constants determination in SiON thin films

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