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Backside-illuminated scientific CMOS detector for soft X-ray resonant scattering and ptychography

Abstract : Huge progress have been done with the 3 rd generation storage ring, and more recently the ultimate storage ring under development suggest an unprecedent increase of x-ray brightness. Unfortunately, as far as the detectors are concerned, progress has not been as fast and even more so in the range of soft x-rays. In particular for 2D detector the most commonly used detector are based on old CCD technology and the recent development of CMOS detector will be certainly crucial for 2D detector in the soft x-rays. With this goal we explore the possibilities and the the performance of a camera equipped with new mass-marketed scientific Complementary Metal Oxide Semiconductor Back Side Illuminated (sCMOS-BSI) integrated in vacuum environment for soft X-ray experiment at synchrotron. The 4 Mpix sensor reaches a frame rate up to 48 fps while suiting the necessary performances needed for X-ray experiments, in term of linearity (98 %), homogeneity (PRNU <1%) charge capacity (up to 80 ke-), readout noise (down to 2 e-rms) and adequate dark current (3 e-/s/px). The sensor performances tests in the X-ray range have been performed at the SOLEIL METROLOGIE beamline. The Quantum Efficiency, the spatial resolution (24 lp/mm), the energy resolution (< 100 eV) and the radiation damage versus the X-ray dose (< 200 Gy) have been evaluated in the energy range from 40 eV to 2000 eV. In order to illustrate the capabilities of this new sCMOS-BSI sensor, several experiments have been performed at three soft x-ray beamline of the SOLEIL synchrotron: diffraction pattern from a pinhole at 186 eV, scattering experiment from nanostructured Co/Cu multilayer at 700 eV and Ptychoraphy imaging in transmission at 706 eV.
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Preprints, Working Papers, ...
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https://hal-cnrs.archives-ouvertes.fr/hal-02988751
Contributor : Maurizio Sacchi <>
Submitted on : Friday, November 27, 2020 - 7:33:19 PM
Last modification on : Thursday, January 7, 2021 - 11:04:07 AM
Long-term archiving on: : Sunday, February 28, 2021 - 7:45:52 PM

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Kewin Desjardins, Kadda Medjoubi, Pascal Mercère, Paulo da Silva, Horia Popescu, et al.. Backside-illuminated scientific CMOS detector for soft X-ray resonant scattering and ptychography. 2020. ⟨hal-02988751⟩

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