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Comprehensive optical losses investigation of VLSI Silicon optomechanical ring resonator sensors

L. Schwab P.E. Allain L. Banniard A. Fafin M. Gély 1 O. Lemonnier P. Grosse 2 M. Hermouet S. Hentz 1 I. Favero 3 B. Legrand G. Jourdan 4 
1 CEA-LETI - Commissariat à l'énergie atomique et aux énergies alternatives - Laboratoire d'Electronique et de Technologie de l'Information
2 DOPT - Département d'Optronique
3 MPQ (UMR_7162) - Laboratoire Matériaux et Phénomènes Quantiques
4 IUSTI - Institut universitaire des systèmes thermiques industriels
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https://hal-cnrs.archives-ouvertes.fr/hal-02365398
Contributor : Ivan Favero Connect in order to contact the contributor
Submitted on : Friday, November 15, 2019 - 1:35:30 PM
Last modification on : Friday, April 15, 2022 - 9:14:02 AM

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CEA | UNIV-PARIS7 | CNRS | UNIV-AMU | DRT | IUSTI | USPC | LETI | CEA-GRE | UNIV-PARIS | UP-SCIENCES | MPQ

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L. Schwab, P.E. Allain, L. Banniard, A. Fafin, M. Gély, et al.. Comprehensive optical losses investigation of VLSI Silicon optomechanical ring resonator sensors. 2018 IEEE International Electron Devices Meeting (IEDM), Dec 2018, San Francisco, France. IEEE, pp.4.7.1-4.7.4, 2018, ⟨10.1109/IEDM.2018.8614508⟩. ⟨hal-02365398⟩

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