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Comprehensive optical losses investigation of VLSI Silicon optomechanical ring resonator sensors

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https://hal-cnrs.archives-ouvertes.fr/hal-02365398
Contributor : Ivan Favero Connect in order to contact the contributor
Submitted on : Friday, November 15, 2019 - 1:35:30 PM
Last modification on : Friday, April 15, 2022 - 9:14:02 AM

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L. Schwab, P.E. Allain, L. Banniard, A. Fafin, M. Gély, et al.. Comprehensive optical losses investigation of VLSI Silicon optomechanical ring resonator sensors. 2018 IEEE International Electron Devices Meeting (IEDM), Dec 2018, San Francisco, France. IEEE, pp.4.7.1-4.7.4, 2018, ⟨10.1109/IEDM.2018.8614508⟩. ⟨hal-02365398⟩

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